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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/access/TinTYKTLTTP21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Angela_Pei_San_Tan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ching_Kwang_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Eric_Ken_Yong_Teo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hing_Yong>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jimmy_Ook_Hyun_Kim>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Peter_Than>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Saw_Chin_Tan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Siew_Chee_Phang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tze_Chiang_Tin>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FACCESS.2021.3076193>
foaf:homepage <https://doi.org/10.1109/ACCESS.2021.3076193>
dc:identifier DBLP journals/access/TinTYKTLTTP21 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FACCESS.2021.3076193 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/access>
rdfs:label A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Angela_Pei_San_Tan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ching_Kwang_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Eric_Ken_Yong_Teo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hing_Yong>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jimmy_Ook_Hyun_Kim>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Peter_Than>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Saw_Chin_Tan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Siew_Chee_Phang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tze_Chiang_Tin>
swrc:pages 65418-65439 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/access/TinTYKTLTTP21/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/access/TinTYKTLTTP21>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/access/access9.html#TinTYKTLTTP21>
rdfs:seeAlso <https://doi.org/10.1109/ACCESS.2021.3076193>
dc:title A Realizable Overlay Virtual Metrology System in Semiconductor Manufacturing: Proposal, Challenges and Future Perspective. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 9 (xsd:string)