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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/access/YoonLLJYKB19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bohyeon_Kang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hyeok_Yun>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jinsu_Jeong>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jun-Sik_Yoon>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Junjong_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rock-Hyun_Baek>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Seunghwan_Lee>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FACCESS.2019.2956503>
foaf:homepage <https://doi.org/10.1109/ACCESS.2019.2956503>
dc:identifier DBLP journals/access/YoonLLJYKB19 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FACCESS.2019.2956503 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/access>
rdfs:label Source/Drain Patterning FinFETs as Solution for Physical Area Scaling Toward 5-nm Node. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bohyeon_Kang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hyeok_Yun>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jinsu_Jeong>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jun-Sik_Yoon>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Junjong_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rock-Hyun_Baek>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Seunghwan_Lee>
swrc:pages 172290-172295 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/access/YoonLLJYKB19/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/access/YoonLLJYKB19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/access/access7.html#YoonLLJYKB19>
rdfs:seeAlso <https://doi.org/10.1109/ACCESS.2019.2956503>
dc:title Source/Drain Patterning FinFETs as Solution for Physical Area Scaling Toward 5-nm Node. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 7 (xsd:string)