[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/aei/XuQHSLZ24>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hongwei_Xu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jie_Zhang_0041>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jinhua_Hu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wei_Qin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yan-Ning_Sun>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Youlong_Lv>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.aei.2023.102272>
foaf:homepage <https://doi.org/10.1016/j.aei.2023.102272>
dc:identifier DBLP journals/aei/XuQHSLZ24 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.aei.2023.102272 (xsd:string)
dcterms:issued 2024 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/aei>
rdfs:label A Copula network deconvolution-based direct correlation disentangling framework for explainable fault detection in semiconductor wafer fabrication. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hongwei_Xu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jie_Zhang_0041>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jinhua_Hu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wei_Qin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yan-Ning_Sun>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Youlong_Lv>
swrc:pages 102272 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/aei/XuQHSLZ24/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/aei/XuQHSLZ24>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/aei/aei59.html#XuQHSLZ24>
rdfs:seeAlso <https://doi.org/10.1016/j.aei.2023.102272>
dc:title A Copula network deconvolution-based direct correlation disentangling framework for explainable fault detection in semiconductor wafer fabrication. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 59 (xsd:string)