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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/candie/ChienNLC23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chen-Fu_Chien_0001>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tran_Hong_Van_Nguyen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yi-Chiu_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ying-Jen_Chen>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.cie.2023.109421>
foaf:homepage <https://doi.org/10.1016/j.cie.2023.109421>
dc:identifier DBLP journals/candie/ChienNLC23 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.cie.2023.109421 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/candie>
rdfs:label Bayesian decision analysis for optimizing in-line metrology and defect inspection strategy for sustainable semiconductor manufacturing and an empirical study. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chen-Fu_Chien_0001>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tran_Hong_Van_Nguyen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yi-Chiu_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ying-Jen_Chen>
swrc:month August (xsd:string)
swrc:pages 109421 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/candie/ChienNLC23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/candie/ChienNLC23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/candie/candie182.html#ChienNLC23>
rdfs:seeAlso <https://doi.org/10.1016/j.cie.2023.109421>
dc:title Bayesian decision analysis for optimizing in-line metrology and defect inspection strategy for sustainable semiconductor manufacturing and an empirical study. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 182 (xsd:string)