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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/candie/MadathilNMK18>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mary_E._Kurz>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Scott_J._Mason>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Siddhartha_Nambiar>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sreenath_Chalil_Madathil>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.cie.2018.05.036>
foaf:homepage <https://doi.org/10.1016/j.cie.2018.05.036>
dc:identifier DBLP journals/candie/MadathilNMK18 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.cie.2018.05.036 (xsd:string)
dcterms:issued 2018 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/candie>
rdfs:label On scheduling a photolithography area containing cluster tools. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mary_E._Kurz>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Scott_J._Mason>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Siddhartha_Nambiar>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sreenath_Chalil_Madathil>
swrc:pages 177-188 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/candie/MadathilNMK18/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/candie/MadathilNMK18>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/candie/candie121.html#MadathilNMK18>
rdfs:seeAlso <https://doi.org/10.1016/j.cie.2018.05.036>
dc:title On scheduling a photolithography area containing cluster tools. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 121 (xsd:string)