[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/candie/PanT11>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Damon_H._E._Tai>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jason_Chao-Hsien_Pan>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.cie.2010.09.008>
foaf:homepage <https://doi.org/10.1016/j.cie.2010.09.008>
dc:identifier DBLP journals/candie/PanT11 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.cie.2010.09.008 (xsd:string)
dcterms:issued 2011 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/candie>
rdfs:label A new strategy for defect inspection by the virtual inspection in semiconductor wafer fabrication. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Damon_H._E._Tai>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jason_Chao-Hsien_Pan>
swrc:number 1 (xsd:string)
swrc:pages 16-24 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/candie/PanT11/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/candie/PanT11>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/candie/candie60.html#PanT11>
rdfs:seeAlso <https://doi.org/10.1016/j.cie.2010.09.008>
dc:title A new strategy for defect inspection by the virtual inspection in semiconductor wafer fabrication. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 60 (xsd:string)