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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/cce/CroseZTC18>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Anh_Tran>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Marquis_Crose>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Panagiotis_D._Christofides>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Weiqi_Zhang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.compchemeng.2018.03.011>
foaf:homepage <https://doi.org/10.1016/j.compchemeng.2018.03.011>
dc:identifier DBLP journals/cce/CroseZTC18 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.compchemeng.2018.03.011 (xsd:string)
dcterms:issued 2018 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/cce>
rdfs:label Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Anh_Tran>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Marquis_Crose>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Panagiotis_D._Christofides>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Weiqi_Zhang>
swrc:pages 184-195 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/cce/CroseZTC18/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/cce/CroseZTC18>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/cce/cce113.html#CroseZTC18>
rdfs:seeAlso <https://doi.org/10.1016/j.compchemeng.2018.03.011>
dc:title Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 113 (xsd:string)