Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/cce/CroseZTC18
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/cce/CroseZTC18
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Anh_Tran
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Marquis_Crose
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Panagiotis_D._Christofides
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Weiqi_Zhang
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1016%2Fj.compchemeng.2018.03.011
>
foaf:
homepage
<
https://doi.org/10.1016/j.compchemeng.2018.03.011
>
dc:
identifier
DBLP journals/cce/CroseZTC18
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1016%2Fj.compchemeng.2018.03.011
(xsd:string)
dcterms:
issued
2018
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/cce
>
rdfs:
label
Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Anh_Tran
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Marquis_Crose
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Panagiotis_D._Christofides
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Weiqi_Zhang
>
swrc:
pages
184-195
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/cce/CroseZTC18/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/cce/CroseZTC18
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/cce/cce113.html#CroseZTC18
>
rdfs:
seeAlso
<
https://doi.org/10.1016/j.compchemeng.2018.03.011
>
dc:
title
Multiscale three-dimensional CFD modeling for PECVD of amorphous silicon thin films.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
113
(xsd:string)