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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/chinaf/CaiZHSW08>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qiang_Zhou_0001>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rui_Shi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xianlong_Hong>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yang_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yici_Cai>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2Fs11432-008-0006-4>
foaf:homepage <https://doi.org/10.1007/s11432-008-0006-4>
dc:identifier DBLP journals/chinaf/CaiZHSW08 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2Fs11432-008-0006-4 (xsd:string)
dcterms:issued 2008 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/chinaf>
rdfs:label Application of optical proximity correction technology. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qiang_Zhou_0001>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rui_Shi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xianlong_Hong>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yang_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yici_Cai>
swrc:number 2 (xsd:string)
swrc:pages 213-224 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/chinaf/CaiZHSW08/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/chinaf/CaiZHSW08>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/chinaf/chinaf51.html#CaiZHSW08>
rdfs:seeAlso <https://doi.org/10.1007/s11432-008-0006-4>
dc:subject OPC; rules-based; model-based; layout; IC (xsd:string)
dc:title Application of optical proximity correction technology. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 51 (xsd:string)