Application of optical proximity correction technology.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/chinaf/CaiZHSW08
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dcterms:
bibliographicCitation
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http://dblp.uni-trier.de/rec/bibtex/journals/chinaf/CaiZHSW08
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https://dblp.l3s.de/d2r/resource/authors/Qiang_Zhou_0001
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https://dblp.l3s.de/d2r/resource/authors/Rui_Shi
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https://dblp.l3s.de/d2r/resource/authors/Xianlong_Hong
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DOI doi.org%2F10.1007%2Fs11432-008-0006-4
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dcterms:
issued
2008
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swrc:
journal
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https://dblp.l3s.de/d2r/resource/journals/chinaf
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rdfs:
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Application of optical proximity correction technology.
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foaf:
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2
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213-224
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dc:
subject
OPC; rules-based; model-based; layout; IC
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title
Application of optical proximity correction technology.
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51
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