Challenges of 22 nm and beyond CMOS technology.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/chinaf/HuangWKXSATWZZW09
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Challenges of 22 nm and beyond CMOS technology.
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CMOS technology; 22 nm technology node; device architectures; metal gate/high K dielectrics; ultra low K dielectrics
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Challenges of 22 nm and beyond CMOS technology.
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