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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/cii/CaiFYLLL20>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Haoshu_Cai>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jay_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jianshe_Feng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qibo_Yang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wenzhe_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xiang_Li_0018>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.compind.2020.103228>
foaf:homepage <https://doi.org/10.1016/j.compind.2020.103228>
dc:identifier DBLP journals/cii/CaiFYLLL20 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.compind.2020.103228 (xsd:string)
dcterms:issued 2020 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/cii>
rdfs:label A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Haoshu_Cai>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jay_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jianshe_Feng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qibo_Yang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wenzhe_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xiang_Li_0018>
swrc:pages 103228 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/cii/CaiFYLLL20/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/cii/CaiFYLLL20>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/cii/cii119.html#CaiFYLLL20>
rdfs:seeAlso <https://doi.org/10.1016/j.compind.2020.103228>
dc:title A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 119 (xsd:string)