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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/corr/abs-0805-0862>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/C._W._Lu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/H._P._Maw>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/S._H._Ling>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xuechuan_Shan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Y._C._Lam>
foaf:homepage <http://arxiv.org/abs/0805.0862>
dc:identifier DBLP journals/corr/abs-0805-0862 (xsd:string)
dcterms:issued 2008 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/corr>
rdfs:label Micro Embossing of Ceramic Green Substrates for Micro Devices (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/C._W._Lu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/H._P._Maw>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/S._H._Ling>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xuechuan_Shan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Y._C._Lam>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/corr/abs-0805-0862/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/corr/abs-0805-0862>
rdfs:seeAlso <http://arxiv.org/abs/0805.0862>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/corr/corr0805.html#abs-0805-0862>
dc:title Micro Embossing of Ceramic Green Substrates for Micro Devices (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume abs/0805.0862 (xsd:string)