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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/corr/abs-2109-01406>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Borislav_Borislavov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jan_Trieschmann>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tobias_Gergs>
foaf:homepage <http://dx.doi.org/doi.org%2F10.48550%2FarXiv.2109.01406>
foaf:homepage <https://doi.org/10.48550/arXiv.2109.01406>
dc:identifier DBLP journals/corr/abs-2109-01406 (xsd:string)
dc:identifier DOI doi.org%2F10.48550%2FarXiv.2109.01406 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/corr>
rdfs:label An efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Borislav_Borislavov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jan_Trieschmann>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tobias_Gergs>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/corr/abs-2109-01406/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/corr/abs-2109-01406>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/corr/corr2109.html#abs-2109-01406>
rdfs:seeAlso <https://doi.org/10.48550/arXiv.2109.01406>
dc:title An efficient plasma-surface interaction surrogate model for sputtering processes based on autoencoder neural networks. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume abs/2109.01406 (xsd:string)