Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges. | D2R Server publishing the DBLP Bibliography Database, hosted at L3S Research Center

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dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Jan_Trieschmann>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Thomas_Mussenbrock>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Tobias_Gergs>
foaf:homepage	<http://dx.doi.org/doi.org%2F10.48550%2FarXiv.2211.04796>
foaf:homepage	<https://doi.org/10.48550/arXiv.2211.04796>
dc:identifier	DBLP journals/corr/abs-2211-04796 (xsd:string)
dc:identifier	DOI doi.org%2F10.48550%2FarXiv.2211.04796 (xsd:string)
dcterms:issued	2022 (xsd:gYear)
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rdfs:label	Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges. (xsd:string)
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Jan_Trieschmann>
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Thomas_Mussenbrock>
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Tobias_Gergs>
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rdfs:seeAlso	<https://doi.org/10.48550/arXiv.2211.04796>
dc:title	Physics-separating artificial neural networks for predicting initial stages of Al sputtering and thin film deposition in Ar plasma discharges. (xsd:string)
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