Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N$_2$ discharges on experimental timescales. | D2R Server publishing the DBLP Bibliography Database, hosted at L3S Research Center

Property	Value
dcterms:bibliographicCitation	<http://dblp.uni-trier.de/rec/bibtex/journals/corr/abs-2301-03524>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Jan_Trieschmann>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Thomas_Mussenbrock>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Tobias_Gergs>
foaf:homepage	<http://dx.doi.org/doi.org%2F10.48550%2FarXiv.2301.03524>
foaf:homepage	<https://doi.org/10.48550/arXiv.2301.03524>
dc:identifier	DBLP journals/corr/abs-2301-03524 (xsd:string)
dc:identifier	DOI doi.org%2F10.48550%2FarXiv.2301.03524 (xsd:string)
dcterms:issued	2023 (xsd:gYear)
swrc:journal	<https://dblp.l3s.de/d2r/resource/journals/corr>
rdfs:label	Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N$_2$ discharges on experimental timescales. (xsd:string)
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Jan_Trieschmann>
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Thomas_Mussenbrock>
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Tobias_Gergs>
owl:sameAs	<http://bibsonomy.org/uri/bibtexkey/journals/corr/abs-2301-03524/dblp>
owl:sameAs	<http://dblp.rkbexplorer.com/id/journals/corr/abs-2301-03524>
rdfs:seeAlso	<http://dblp.uni-trier.de/db/journals/corr/corr2301.html#abs-2301-03524>
rdfs:seeAlso	<https://doi.org/10.48550/arXiv.2301.03524>
dc:title	Physics-separating artificial neural networks for predicting sputtering and thin film deposition of AlN in Ar/N$_2$ discharges on experimental timescales. (xsd:string)
dc:type	<http://purl.org/dc/dcmitype/Text>
rdf:type	swrc:Article
rdf:type	foaf:Document
swrc:volume	abs/2301.03524 (xsd:string)