[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/corr/abs-2301-08974>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Angzhi_Fan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fei_Xu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sthitie_Bom>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yu_Huang_0017>
foaf:homepage <http://dx.doi.org/doi.org%2F10.48550%2FarXiv.2301.08974>
foaf:homepage <https://doi.org/10.48550/arXiv.2301.08974>
dc:identifier DBLP journals/corr/abs-2301-08974 (xsd:string)
dc:identifier DOI doi.org%2F10.48550%2FarXiv.2301.08974 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/corr>
rdfs:label Soft Sensing Regression Model: from Sensor to Wafer Metrology Forecasting. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Angzhi_Fan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fei_Xu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sthitie_Bom>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yu_Huang_0017>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/corr/abs-2301-08974/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/corr/abs-2301-08974>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/corr/corr2301.html#abs-2301-08974>
rdfs:seeAlso <https://doi.org/10.48550/arXiv.2301.08974>
dc:title Soft Sensing Regression Model: from Sensor to Wafer Metrology Forecasting. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume abs/2301.08974 (xsd:string)