A finite element procedure for time-dependent radio-frequency sheaths based on a two-dimensional microscale fluid model.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/cphysics/KohnoM23
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A finite element procedure for time-dependent radio-frequency sheaths based on a two-dimensional microscale fluid model.
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A finite element procedure for time-dependent radio-frequency sheaths based on a two-dimensional microscale fluid model.
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