Evaluation of MEMS Capacitive Accelerometers.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/dt/BeliveauSTR99
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dcterms:
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dcterms:
issued
1999
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swrc:
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Evaluation of MEMS Capacitive Accelerometers.
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4
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48-56
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Evaluation of MEMS Capacitive Accelerometers.
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