Logic Design for Printability Using OPC Methods.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/dt/LucasYBWST06
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2006
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Logic Design for Printability Using OPC Methods.
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optical proximity correction (OPC), reticle enhancement technology (RET), design for manufacturability (DFM)
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Logic Design for Printability Using OPC Methods.
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