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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/dt/YericCGDSG05>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Esam_Salem>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ethan_Cohen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Gary_Green>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Greg_Yeric>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/John_Garcia>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kurt_Davis>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FMDT.2005.63>
foaf:homepage <https://doi.org/10.1109/MDT.2005.63>
dc:identifier DBLP journals/dt/YericCGDSG05 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FMDT.2005.63 (xsd:string)
dcterms:issued 2005 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/dt>
rdfs:label Infrastructure for Successful BEOL Yield Ramp, Transfer to Manufacturing, and DFM Characterization at 65 nm and Below. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Esam_Salem>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ethan_Cohen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Gary_Green>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Greg_Yeric>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/John_Garcia>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kurt_Davis>
swrc:number 3 (xsd:string)
swrc:pages 232-239 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/dt/YericCGDSG05/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/dt/YericCGDSG05>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/dt/dt22.html#YericCGDSG05>
rdfs:seeAlso <https://doi.org/10.1109/MDT.2005.63>
dc:subject systematic yield loss, test structure, BEOL, infrastructure IP, process monitoring, silicon debug , DFM (xsd:string)
dc:title Infrastructure for Successful BEOL Yield Ramp, Transfer to Manufacturing, and DFM Characterization at 65 nm and Below. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 22 (xsd:string)