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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/eswa/ChenLDL07>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Amy_H._I._Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kan-Yuang_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wei-Jaw_Deng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wen-Chin_Chen>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.eswa.2006.02.013>
foaf:homepage <https://doi.org/10.1016/j.eswa.2006.02.013>
dc:identifier DBLP journals/eswa/ChenLDL07 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.eswa.2006.02.013 (xsd:string)
dcterms:issued 2007 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/eswa>
rdfs:label The implementation of neural network for semiconductor PECVD process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Amy_H._I._Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kan-Yuang_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wei-Jaw_Deng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wen-Chin_Chen>
swrc:number 4 (xsd:string)
swrc:pages 1148-1153 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/eswa/ChenLDL07/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/eswa/ChenLDL07>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/eswa/eswa32.html#ChenLDL07>
rdfs:seeAlso <https://doi.org/10.1016/j.eswa.2006.02.013>
dc:title The implementation of neural network for semiconductor PECVD process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 32 (xsd:string)