Intelligent adaptive process control using dynamic deadband for semiconductor manufacturing.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/eswa/KoKKBK11
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/eswa/KoKKBK11
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Hyo-Heon_Ko
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Jihyun_Kim_0001
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Jun-Geol_Baek
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Jun-Seok_Kim
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Sung-Shick_Kim
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1016%2Fj.eswa.2010.12.073
>
foaf:
homepage
<
https://doi.org/10.1016/j.eswa.2010.12.073
>
dc:
identifier
DBLP journals/eswa/KoKKBK11
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1016%2Fj.eswa.2010.12.073
(xsd:string)
dcterms:
issued
2011
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/eswa
>
rdfs:
label
Intelligent adaptive process control using dynamic deadband for semiconductor manufacturing.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Hyo-Heon_Ko
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Jihyun_Kim_0001
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Jun-Geol_Baek
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Jun-Seok_Kim
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Sung-Shick_Kim
>
swrc:
number
6
(xsd:string)
swrc:
pages
6759-6767
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/eswa/KoKKBK11/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/eswa/KoKKBK11
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/eswa/eswa38.html#KoKKBK11
>
rdfs:
seeAlso
<
https://doi.org/10.1016/j.eswa.2010.12.073
>
dc:
title
Intelligent adaptive process control using dynamic deadband for semiconductor manufacturing.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
38
(xsd:string)