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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ibmrd/FaheyMSMMS92>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J._Daniel_Mis>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/James_A._Slinkman>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Paul_M._Fahey>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rick_L._Mohler>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Scott_R._Stiffler>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Siegfried_R._Mader>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1147%2Frd.362.0158>
foaf:homepage <https://doi.org/10.1147/rd.362.0158>
dc:identifier DBLP journals/ibmrd/FaheyMSMMS92 (xsd:string)
dc:identifier DOI doi.org%2F10.1147%2Frd.362.0158 (xsd:string)
dcterms:issued 1992 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ibmrd>
rdfs:label Stress-induced dislocations in silicon integrated circuits. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J._Daniel_Mis>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/James_A._Slinkman>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Paul_M._Fahey>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rick_L._Mohler>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Scott_R._Stiffler>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Siegfried_R._Mader>
swrc:number 2 (xsd:string)
swrc:pages 158-182 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ibmrd/FaheyMSMMS92/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ibmrd/FaheyMSMMS92>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd36.html#FaheyMSMMS92>
rdfs:seeAlso <https://doi.org/10.1147/rd.362.0158>
dc:title Stress-induced dislocations in silicon integrated circuits. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 36 (xsd:string)