Manufacturing with DUV lithography.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/ibmrd/HolmesMH97
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dcterms:
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https://dblp.l3s.de/d2r/resource/authors/Mark_C._Hakey
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https://dblp.l3s.de/d2r/resource/authors/Peter_H._Mitchell
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https://dblp.l3s.de/d2r/resource/authors/Steven_J._Holmes
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dcterms:
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1997
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Manufacturing with DUV lithography.
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7-20
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Manufacturing with DUV lithography.
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41
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