Electromigration and stress-induced voiding in fine Al and Al-alloy thin-film lines.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/ibmrd/HuRSLB95
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1995
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Electromigration and stress-induced voiding in fine Al and Al-alloy thin-film lines.
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Electromigration and stress-induced voiding in fine Al and Al-alloy thin-film lines.
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