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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ibmrd/SilvermanRO93>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/James_M._Oberschmidt>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jerome_P._Silverman>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Robert_P._Rippstein>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1147%2Frd.373.0395>
foaf:homepage <https://doi.org/10.1147/rd.373.0395>
dc:identifier DBLP journals/ibmrd/SilvermanRO93 (xsd:string)
dc:identifier DOI doi.org%2F10.1147%2Frd.373.0395 (xsd:string)
dcterms:issued 1993 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ibmrd>
rdfs:label X-ray lithography beamlines in the IBM Advanced Lithography Facility. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/James_M._Oberschmidt>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jerome_P._Silverman>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Robert_P._Rippstein>
swrc:number 3 (xsd:string)
swrc:pages 395-410 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ibmrd/SilvermanRO93/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ibmrd/SilvermanRO93>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd37.html#SilvermanRO93>
rdfs:seeAlso <https://doi.org/10.1147/rd.373.0395>
dc:title X-ray lithography beamlines in the IBM Advanced Lithography Facility. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 37 (xsd:string)