[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ibmrd/VereeckenBDA05>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hariklia_Deligianni>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Panayotis_C._Andricacos>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Phillipe_M._Vereecken>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Robert_A._Binstead>
foaf:homepage <http://www.research.ibm.com/journal/rd/491/vereecken.pdf>
dc:identifier DBLP journals/ibmrd/VereeckenBDA05 (xsd:string)
dcterms:issued 2005 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ibmrd>
rdfs:label The chemistry of additives in damascene copper plating. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hariklia_Deligianni>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Panayotis_C._Andricacos>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Phillipe_M._Vereecken>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Robert_A._Binstead>
swrc:number 1 (xsd:string)
swrc:pages 3-18 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ibmrd/VereeckenBDA05/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ibmrd/VereeckenBDA05>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd49.html#VereeckenBDA05>
rdfs:seeAlso <http://www.research.ibm.com/journal/rd/491/vereecken.pdf>
dc:title The chemistry of additives in damascene copper plating. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 49 (xsd:string)