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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ibmrd/WestDA05>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Alan_C._West>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hariklia_Deligianni>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Panayotis_C._Andricacos>
foaf:homepage <http://www.research.ibm.com/journal/rd/491/west.pdf>
dc:identifier DBLP journals/ibmrd/WestDA05 (xsd:string)
dcterms:issued 2005 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ibmrd>
rdfs:label Electrochemical planarization of interconnect metallization. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Alan_C._West>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hariklia_Deligianni>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Panayotis_C._Andricacos>
swrc:number 1 (xsd:string)
swrc:pages 37-48 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ibmrd/WestDA05/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ibmrd/WestDA05>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ibmrd/ibmrd49.html#WestDA05>
rdfs:seeAlso <http://www.research.ibm.com/journal/rd/491/west.pdf>
dc:title Electrochemical planarization of interconnect metallization. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 49 (xsd:string)