Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot for circular defect in photonic crystal laser.
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Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot for circular defect in photonic crystal laser.
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Advanced dry etching of GaAs/AlGaAs multilayer wafer with InAs quantum dot for circular defect in photonic crystal laser.
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