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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ieiceee/TakahashiMFT06>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hiroshi_Toshiyoshi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hiroyuki_Fujita>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kazuhiro_Takahashi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Makoto_Mita>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1587%2Felex.3.197>
foaf:homepage <https://doi.org/10.1587/elex.3.197>
dc:identifier DBLP journals/ieiceee/TakahashiMFT06 (xsd:string)
dc:identifier DOI doi.org%2F10.1587%2Felex.3.197 (xsd:string)
dcterms:issued 2006 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ieiceee>
rdfs:label A high fill-factor comb-driven XY-stage with topological layer switch architecture. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hiroshi_Toshiyoshi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hiroyuki_Fujita>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kazuhiro_Takahashi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Makoto_Mita>
swrc:number 9 (xsd:string)
swrc:pages 197-202 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ieiceee/TakahashiMFT06/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ieiceee/TakahashiMFT06>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ieiceee/ieiceee3.html#TakahashiMFT06>
rdfs:seeAlso <https://doi.org/10.1587/elex.3.197>
dc:title A high fill-factor comb-driven XY-stage with topological layer switch architecture. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 3 (xsd:string)