[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ieiceee/UchiyamaT04>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hiroyuki_Uchiyama>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Takafumi_Taniguchi>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1587%2Felex.1.46>
foaf:homepage <https://doi.org/10.1587/elex.1.46>
dc:identifier DBLP journals/ieiceee/UchiyamaT04 (xsd:string)
dc:identifier DOI doi.org%2F10.1587%2Felex.1.46 (xsd:string)
dcterms:issued 2004 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ieiceee>
rdfs:label Plasma-Induced Fluorine Damage in P-HEMT Caused by C2F6/CHF3 RIE Plasma. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hiroyuki_Uchiyama>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Takafumi_Taniguchi>
swrc:number 2 (xsd:string)
swrc:pages 46-50 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ieiceee/UchiyamaT04/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ieiceee/UchiyamaT04>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ieiceee/ieiceee1.html#UchiyamaT04>
rdfs:seeAlso <https://doi.org/10.1587/elex.1.46>
dc:title Plasma-Induced Fluorine Damage in P-HEMT Caused by C2F6/CHF3 RIE Plasma. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 1 (xsd:string)