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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ieiceee/UchiyamaTK05>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hiroyuki_Uchiyama>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Takafumi_Taniguchi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Takeshi_Kikawa>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1587%2Felex.2.143>
foaf:homepage <https://doi.org/10.1587/elex.2.143>
dc:identifier DBLP journals/ieiceee/UchiyamaTK05 (xsd:string)
dc:identifier DOI doi.org%2F10.1587%2Felex.2.143 (xsd:string)
dcterms:issued 2005 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ieiceee>
rdfs:label Reduction of plasma-induced fluorine damage to P-HEMTs using x-ray emission. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hiroyuki_Uchiyama>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Takafumi_Taniguchi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Takeshi_Kikawa>
swrc:number 5 (xsd:string)
swrc:pages 143-148 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ieiceee/UchiyamaTK05/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ieiceee/UchiyamaTK05>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ieiceee/ieiceee2.html#UchiyamaTK05>
rdfs:seeAlso <https://doi.org/10.1587/elex.2.143>
dc:title Reduction of plasma-induced fluorine damage to P-HEMTs using x-ray emission. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 2 (xsd:string)