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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ieicet/AwadTK16>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ahmed_Awad_0002>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Atsushi_Takahashi_0001>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chikaaki_Kodama>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1587%2Ftransfun.E99.A.2363>
foaf:homepage <https://doi.org/10.1587/transfun.E99.A.2363>
dc:identifier DBLP journals/ieicet/AwadTK16 (xsd:string)
dc:identifier DOI doi.org%2F10.1587%2Ftransfun.E99.A.2363 (xsd:string)
dcterms:issued 2016 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ieicet>
rdfs:label A Fast Mask Manufacturability and Process Variation Aware OPC Algorithm with Exploiting a Novel Intensity Estimation Model. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ahmed_Awad_0002>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Atsushi_Takahashi_0001>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chikaaki_Kodama>
swrc:number 12 (xsd:string)
swrc:pages 2363-2374 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ieicet/AwadTK16/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ieicet/AwadTK16>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ieicet/ieicet99a.html#AwadTK16>
rdfs:seeAlso <https://doi.org/10.1587/transfun.E99.A.2363>
dc:title A Fast Mask Manufacturability and Process Variation Aware OPC Algorithm with Exploiting a Novel Intensity Estimation Model. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 99-A (xsd:string)