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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ieicet/NagasawaHSHAFYTT14>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Akira_Fujimaki>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hiroyuki_Akaike>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kazuyoshi_Takagi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kenji_Hinode>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mutsuo_Hidaka>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Naofumi_Takagi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Nobuyuki_Yoshikawa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shuichi_Nagasawa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tetsuro_Satoh>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1587%2Ftransele.E97.C.132>
foaf:homepage <https://doi.org/10.1587/transele.E97.C.132>
dc:identifier DBLP journals/ieicet/NagasawaHSHAFYTT14 (xsd:string)
dc:identifier DOI doi.org%2F10.1587%2Ftransele.E97.C.132 (xsd:string)
dcterms:issued 2014 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ieicet>
rdfs:label Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Akira_Fujimaki>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hiroyuki_Akaike>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kazuyoshi_Takagi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kenji_Hinode>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mutsuo_Hidaka>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Naofumi_Takagi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Nobuyuki_Yoshikawa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shuichi_Nagasawa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tetsuro_Satoh>
swrc:number 3 (xsd:string)
swrc:pages 132-140 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ieicet/NagasawaHSHAFYTT14/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ieicet/NagasawaHSHAFYTT14>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ieicet/ieicet97c.html#NagasawaHSHAFYTT14>
rdfs:seeAlso <https://doi.org/10.1587/transele.E97.C.132>
dc:title Nb 9-Layer Fabrication Process for Superconducting Large-Scale SFQ Circuits and Its Process Evaluation. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 97-C (xsd:string)