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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ieicet/OhmiTZM18>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shun%27ichiro_Ohmi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Weiguang_Zuo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yasushi_Masahiro>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuya_Tsukamoto>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1587%2Ftransele.E101.C.311>
foaf:homepage <https://doi.org/10.1587/transele.E101.C.311>
dc:identifier DBLP journals/ieicet/OhmiTZM18 (xsd:string)
dc:identifier DOI doi.org%2F10.1587%2Ftransele.E101.C.311 (xsd:string)
dcterms:issued 2018 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ieicet>
rdfs:label PdEr-Silicide Formation and Contact Resistivity Reduction to n-Si(100) Realized by Dopant Segregation Process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shun%27ichiro_Ohmi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Weiguang_Zuo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yasushi_Masahiro>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuya_Tsukamoto>
swrc:number 5 (xsd:string)
swrc:pages 311-316 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ieicet/OhmiTZM18/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ieicet/OhmiTZM18>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ieicet/ieicet101c.html#OhmiTZM18>
rdfs:seeAlso <https://doi.org/10.1587/transele.E101.C.311>
dc:title PdEr-Silicide Formation and Contact Resistivity Reduction to n-Si(100) Realized by Dopant Segregation Process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 101-C (xsd:string)