Control-oriented plasma modeling and controller design for reactive sputtering.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/ifacjsc/WoelfelOBEBSAL21
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/ifacjsc/WoelfelOBEBSAL21
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Birk_Berger
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Christian_Woelfel
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Dennis_Engel
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Jan_Lunze
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Julian_Schulze
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Moritz_Oberberg
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Peter_Awakowicz
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Ralf_Peter_Brinkmann
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1016%2Fj.ifacsc.2021.100142
>
foaf:
homepage
<
https://doi.org/10.1016/j.ifacsc.2021.100142
>
dc:
identifier
DBLP journals/ifacjsc/WoelfelOBEBSAL21
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1016%2Fj.ifacsc.2021.100142
(xsd:string)
dcterms:
issued
2021
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/ifacjsc
>
rdfs:
label
Control-oriented plasma modeling and controller design for reactive sputtering.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Birk_Berger
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Christian_Woelfel
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Dennis_Engel
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Jan_Lunze
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Julian_Schulze
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Moritz_Oberberg
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Peter_Awakowicz
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Ralf_Peter_Brinkmann
>
swrc:
pages
100142
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/ifacjsc/WoelfelOBEBSAL21/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/ifacjsc/WoelfelOBEBSAL21
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/ifacjsc/ifacjsc16.html#WoelfelOBEBSAL21
>
rdfs:
seeAlso
<
https://doi.org/10.1016/j.ifacsc.2021.100142
>
dc:
title
Control-oriented plasma modeling and controller design for reactive sputtering.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
16
(xsd:string)