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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ifacjsc/WoelfelOBEBSAL21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Birk_Berger>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Christian_Woelfel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dennis_Engel>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jan_Lunze>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Julian_Schulze>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Moritz_Oberberg>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Peter_Awakowicz>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ralf_Peter_Brinkmann>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.ifacsc.2021.100142>
foaf:homepage <https://doi.org/10.1016/j.ifacsc.2021.100142>
dc:identifier DBLP journals/ifacjsc/WoelfelOBEBSAL21 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.ifacsc.2021.100142 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ifacjsc>
rdfs:label Control-oriented plasma modeling and controller design for reactive sputtering. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Birk_Berger>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Christian_Woelfel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dennis_Engel>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jan_Lunze>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Julian_Schulze>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Moritz_Oberberg>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Peter_Awakowicz>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ralf_Peter_Brinkmann>
swrc:pages 100142 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ifacjsc/WoelfelOBEBSAL21/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ifacjsc/WoelfelOBEBSAL21>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ifacjsc/ifacjsc16.html#WoelfelOBEBSAL21>
rdfs:seeAlso <https://doi.org/10.1016/j.ifacsc.2021.100142>
dc:title Control-oriented plasma modeling and controller design for reactive sputtering. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 16 (xsd:string)