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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ijat/ShimizuTMT22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hiroki_Shimizu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Koichi_Tamiya>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shoichiro_Mizukami>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuuma_Tamaru>
foaf:homepage <http://dx.doi.org/doi.org%2F10.20965%2Fijat.2022.p0582>
foaf:homepage <https://doi.org/10.20965/ijat.2022.p0582>
dc:identifier DBLP journals/ijat/ShimizuTMT22 (xsd:string)
dc:identifier DOI doi.org%2F10.20965%2Fijat.2022.p0582 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ijat>
rdfs:label A MEMS Device Integrating Multiple Cantilever Displacement Sensors to Evaluate Flat Machined Surfaces. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hiroki_Shimizu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Koichi_Tamiya>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shoichiro_Mizukami>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuuma_Tamaru>
swrc:number 5 (xsd:string)
swrc:pages 582-587 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ijat/ShimizuTMT22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ijat/ShimizuTMT22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ijat/ijat16.html#ShimizuTMT22>
rdfs:seeAlso <https://doi.org/10.20965/ijat.2022.p0582>
dc:title A MEMS Device Integrating Multiple Cantilever Displacement Sensors to Evaluate Flat Machined Surfaces. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 16 (xsd:string)