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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ijat/UnedaTFA21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michio_Uneda>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Naoki_Takahashi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Takashi_Fujita>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yutaro_Arai>
foaf:homepage <http://dx.doi.org/doi.org%2F10.20965%2Fijat.2021.p0878>
foaf:homepage <https://doi.org/10.20965/ijat.2021.p0878>
dc:identifier DBLP journals/ijat/UnedaTFA21 (xsd:string)
dc:identifier DOI doi.org%2F10.20965%2Fijat.2021.p0878 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ijat>
rdfs:label Flexible Fiber Conditioner for Fine Conditioning of Polishing Pad and its Evaluation in Chemical Mechanical Polishing: Verification of SUS-FFC on Soft Urethane Foam Pad and Proposal of PEEK-FFC. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michio_Uneda>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Naoki_Takahashi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Takashi_Fujita>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yutaro_Arai>
swrc:number 6 (xsd:string)
swrc:pages 878-884 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ijat/UnedaTFA21/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ijat/UnedaTFA21>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ijat/ijat15.html#UnedaTFA21>
rdfs:seeAlso <https://doi.org/10.20965/ijat.2021.p0878>
dc:title Flexible Fiber Conditioner for Fine Conditioning of Polishing Pad and its Evaluation in Chemical Mechanical Polishing: Verification of SUS-FFC on Soft Urethane Foam Pad and Proposal of PEEK-FFC. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 15 (xsd:string)