[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ijat/UnedaTKAI15>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hideo_Aida>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Keiichi_Takano>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ken-Ichi_Ishikawa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Koji_Koyama>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michio_Uneda>
foaf:homepage <http://dx.doi.org/doi.org%2F10.20965%2Fijat.2015.p0573>
foaf:homepage <https://doi.org/10.20965/ijat.2015.p0573>
dc:identifier DBLP journals/ijat/UnedaTKAI15 (xsd:string)
dc:identifier DOI doi.org%2F10.20965%2Fijat.2015.p0573 (xsd:string)
dcterms:issued 2015 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ijat>
rdfs:label Investigation into Chemical Mechanical Polishing Mechanism of Hard-to-Process Materials Using a Commercially Available Single-Sided Polisher. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hideo_Aida>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Keiichi_Takano>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ken-Ichi_Ishikawa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Koji_Koyama>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michio_Uneda>
swrc:number 5 (xsd:string)
swrc:pages 573-579 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ijat/UnedaTKAI15/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ijat/UnedaTKAI15>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ijat/ijat9.html#UnedaTKAI15>
rdfs:seeAlso <https://doi.org/10.20965/ijat.2015.p0573>
dc:title Investigation into Chemical Mechanical Polishing Mechanism of Hard-to-Process Materials Using a Commercially Available Single-Sided Polisher. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 9 (xsd:string)