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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ijces/MurakoshiSM03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ryutaro_Maeda>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xuechuan_Shan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Y._Murakoshi>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1142%2FS1465876303001897>
foaf:homepage <https://doi.org/10.1142/S1465876303001897>
dc:identifier DBLP journals/ijces/MurakoshiSM03 (xsd:string)
dc:identifier DOI doi.org%2F10.1142%2FS1465876303001897 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ijces>
rdfs:label Application Of Micro Hot Embossing For MEMS Structures. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ryutaro_Maeda>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xuechuan_Shan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Y._Murakoshi>
swrc:number 3 (xsd:string)
swrc:pages 617-620 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ijces/MurakoshiSM03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ijces/MurakoshiSM03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ijces/ijces4.html#MurakoshiSM03>
rdfs:seeAlso <https://doi.org/10.1142/S1465876303001897>
dc:title Application Of Micro Hot Embossing For MEMS Structures. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 4 (xsd:string)