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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ijcim/SweeneyC15>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kevin_Curran>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Terence_Sweeney>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1080%2F0951192X.2014.933487>
foaf:homepage <https://doi.org/10.1080/0951192X.2014.933487>
dc:identifier DBLP journals/ijcim/SweeneyC15 (xsd:string)
dc:identifier DOI doi.org%2F10.1080%2F0951192X.2014.933487 (xsd:string)
dcterms:issued 2015 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ijcim>
rdfs:label The detection of empty resist bottles or air in the resist lines of a photolithography coating tool. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kevin_Curran>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Terence_Sweeney>
swrc:number 8 (xsd:string)
swrc:pages 881-892 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ijcim/SweeneyC15/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ijcim/SweeneyC15>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ijcim/ijcim28.html#SweeneyC15>
rdfs:seeAlso <https://doi.org/10.1080/0951192X.2014.933487>
dc:title The detection of empty resist bottles or air in the resist lines of a photolithography coating tool. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 28 (xsd:string)