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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ijmtm/NicholsSK08>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/James_F._Nichols>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Meghan_Shilling>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Thomas_R._Kurfess>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1504%2FIJMTM.2008.016781>
foaf:homepage <https://doi.org/10.1504/IJMTM.2008.016781>
dc:identifier DBLP journals/ijmtm/NicholsSK08 (xsd:string)
dc:identifier DOI doi.org%2F10.1504%2FIJMTM.2008.016781 (xsd:string)
dcterms:issued 2008 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ijmtm>
rdfs:label Review of MEMS metrology solutions. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/James_F._Nichols>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Meghan_Shilling>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Thomas_R._Kurfess>
swrc:number 2/3/4 (xsd:string)
swrc:pages 344-359 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ijmtm/NicholsSK08/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ijmtm/NicholsSK08>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ijmtm/ijmtm13.html#NicholsSK08>
rdfs:seeAlso <https://doi.org/10.1504/IJMTM.2008.016781>
dc:title Review of MEMS metrology solutions. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 13 (xsd:string)