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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ijmtm/WangZPM08>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Benjamin_Y._Park>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chunlei_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Marc_J._Madou>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rabih_Zaouk>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1504%2FIJMTM.2008.016782>
foaf:homepage <https://doi.org/10.1504/IJMTM.2008.016782>
dc:identifier DBLP journals/ijmtm/WangZPM08 (xsd:string)
dc:identifier DOI doi.org%2F10.1504%2FIJMTM.2008.016782 (xsd:string)
dcterms:issued 2008 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ijmtm>
rdfs:label Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Benjamin_Y._Park>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chunlei_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Marc_J._Madou>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rabih_Zaouk>
swrc:number 2/3/4 (xsd:string)
swrc:pages 360-375 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ijmtm/WangZPM08/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ijmtm/WangZPM08>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ijmtm/ijmtm13.html#WangZPM08>
rdfs:seeAlso <https://doi.org/10.1504/IJMTM.2008.016782>
dc:title Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 13 (xsd:string)