Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/ijmtm/WangZPM08
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2008
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Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon.
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Carbon as a MEMS material: micro and nanofabrication of pyrolysed photoresist carbon.
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