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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ijpr/YuL20>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tae-Eog_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tae-Sun_Yu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1080%2F00207543.2019.1593547>
foaf:homepage <https://doi.org/10.1080/00207543.2019.1593547>
dc:identifier DBLP journals/ijpr/YuL20 (xsd:string)
dc:identifier DOI doi.org%2F10.1080%2F00207543.2019.1593547 (xsd:string)
dcterms:issued 2020 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ijpr>
rdfs:label Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tae-Eog_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tae-Sun_Yu>
swrc:number 2 (xsd:string)
swrc:pages 434-447 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ijpr/YuL20/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ijpr/YuL20>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ijpr/ijpr58.html#YuL20>
rdfs:seeAlso <https://doi.org/10.1080/00207543.2019.1593547>
dc:title Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 58 (xsd:string)