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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/integration/HaldHSLSB18>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Axel_Hald>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J%E2%88%9A%C4%BErgen_Scheible>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jens_Lienig>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Johannes_Seelhorst>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Pekka_Herzogenrath>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Peter_Brandl>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1016%2Fj.vlsi.2018.02.004>
foaf:homepage <https://doi.org/10.1016/j.vlsi.2018.02.004>
dc:identifier DBLP journals/integration/HaldHSLSB18 (xsd:string)
dc:identifier DOI doi.org%2F10.1016%2Fj.vlsi.2018.02.004 (xsd:string)
dcterms:issued 2018 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/integration>
rdfs:label Full custom MEMS design: A new method for the analysis of motion-dependent parasitics. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Axel_Hald>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J%E2%88%9A%C4%BErgen_Scheible>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jens_Lienig>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Johannes_Seelhorst>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Pekka_Herzogenrath>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Peter_Brandl>
swrc:pages 362-372 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/integration/HaldHSLSB18/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/integration/HaldHSLSB18>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/integration/integration63.html#HaldHSLSB18>
rdfs:seeAlso <https://doi.org/10.1016/j.vlsi.2018.02.004>
dc:title Full custom MEMS design: A new method for the analysis of motion-dependent parasitics. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 63 (xsd:string)