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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/ipsj/AwadTTK17>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ahmed_Awad_0002>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Atsushi_Takahashi_0001>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chikaaki_Kodama>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Satoshi_Tanaka>
foaf:homepage <http://dx.doi.org/doi.org%2F10.2197%2Fipsjtsldm.10.28>
foaf:homepage <https://doi.org/10.2197/ipsjtsldm.10.28>
dc:identifier DBLP journals/ipsj/AwadTTK17 (xsd:string)
dc:identifier DOI doi.org%2F10.2197%2Fipsjtsldm.10.28 (xsd:string)
dcterms:issued 2017 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/ipsj>
rdfs:label Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency Verification and Further Enhancement. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ahmed_Awad_0002>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Atsushi_Takahashi_0001>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chikaaki_Kodama>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Satoshi_Tanaka>
swrc:pages 28-38 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/ipsj/AwadTTK17/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/ipsj/AwadTTK17>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/ipsj/ipsj10.html#AwadTTK17>
rdfs:seeAlso <https://doi.org/10.2197/ipsjtsldm.10.28>
dc:title Intensity Difference Map (IDM) Accuracy Analysis for OPC Efficiency Verification and Further Enhancement. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 10 (xsd:string)