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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/jcsc/JindalVT19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Deepali_Thukral>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/M._Aditya_Varma>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sumit_Kumar_Jindal>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1142%2FS0218126619502062>
foaf:homepage <https://doi.org/10.1142/S0218126619502062>
dc:identifier DBLP journals/jcsc/JindalVT19 (xsd:string)
dc:identifier DOI doi.org%2F10.1142%2FS0218126619502062 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/jcsc>
rdfs:label Study of MEMS Touch-Mode Capacitive Pressure Sensor Utilizing Flexible SiC Circular Diaphragm: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Deepali_Thukral>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/M._Aditya_Varma>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sumit_Kumar_Jindal>
swrc:number 12 (xsd:string)
swrc:pages 1950206:1-1950206:11 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/jcsc/JindalVT19/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/jcsc/JindalVT19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/jcsc/jcsc28.html#JindalVT19>
rdfs:seeAlso <https://doi.org/10.1142/S0218126619502062>
dc:title Study of MEMS Touch-Mode Capacitive Pressure Sensor Utilizing Flexible SiC Circular Diaphragm: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 28 (xsd:string)