Study of MEMS Touch-Mode Capacitive Pressure Sensor Utilizing Flexible SiC Circular Diaphragm: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/jcsc/JindalVT19
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/jcsc/JindalVT19
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Deepali_Thukral
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/M._Aditya_Varma
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Sumit_Kumar_Jindal
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1142%2FS0218126619502062
>
foaf:
homepage
<
https://doi.org/10.1142/S0218126619502062
>
dc:
identifier
DBLP journals/jcsc/JindalVT19
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1142%2FS0218126619502062
(xsd:string)
dcterms:
issued
2019
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/jcsc
>
rdfs:
label
Study of MEMS Touch-Mode Capacitive Pressure Sensor Utilizing Flexible SiC Circular Diaphragm: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Deepali_Thukral
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/M._Aditya_Varma
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Sumit_Kumar_Jindal
>
swrc:
number
12
(xsd:string)
swrc:
pages
1950206:1-1950206:11
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/jcsc/JindalVT19/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/jcsc/JindalVT19
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/jcsc/jcsc28.html#JindalVT19
>
rdfs:
seeAlso
<
https://doi.org/10.1142/S0218126619502062
>
dc:
title
Study of MEMS Touch-Mode Capacitive Pressure Sensor Utilizing Flexible SiC Circular Diaphragm: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
28
(xsd:string)