Investigation of MEMS Single Turn Meander-Shaped Silicon Carbide Piezoresistive Pressure Sensor on a Clamped Circular Diaphragm for High Pressure Harsh Environment Applications.
Investigation of MEMS Single Turn Meander-Shaped Silicon Carbide Piezoresistive Pressure Sensor on a Clamped Circular Diaphragm for High Pressure Harsh Environment Applications.
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Investigation of MEMS Single Turn Meander-Shaped Silicon Carbide Piezoresistive Pressure Sensor on a Clamped Circular Diaphragm for High Pressure Harsh Environment Applications.
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