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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/jim/JinLZMRG24>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dahyun_Daniel_Lim>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Grace_X._Gu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Meenakshi_Mamunuru>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sassan_Roham>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xueying_Zhao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zeqing_Jin>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2Fs10845-023-02082-8>
foaf:homepage <https://doi.org/10.1007/s10845-023-02082-8>
dc:identifier DBLP journals/jim/JinLZMRG24 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2Fs10845-023-02082-8 (xsd:string)
dcterms:issued 2024 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/jim>
rdfs:label Machine learning enabled optimization of showerhead design for semiconductor deposition process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dahyun_Daniel_Lim>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Grace_X._Gu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Meenakshi_Mamunuru>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sassan_Roham>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xueying_Zhao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zeqing_Jin>
swrc:month February (xsd:string)
swrc:number 2 (xsd:string)
swrc:pages 925-935 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/jim/JinLZMRG24/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/jim/JinLZMRG24>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/jim/jim35.html#JinLZMRG24>
rdfs:seeAlso <https://doi.org/10.1007/s10845-023-02082-8>
dc:title Machine learning enabled optimization of showerhead design for semiconductor deposition process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 35 (xsd:string)