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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/jim/KimJK21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chang_Ouk_Kim>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jaeyeon_Jang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sinyoung_Kim>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1007%2Fs10845-020-01639-1>
foaf:homepage <https://doi.org/10.1007/s10845-020-01639-1>
dc:identifier DBLP journals/jim/KimJK21 (xsd:string)
dc:identifier DOI doi.org%2F10.1007%2Fs10845-020-01639-1 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/jim>
rdfs:label A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chang_Ouk_Kim>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jaeyeon_Jang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sinyoung_Kim>
swrc:number 8 (xsd:string)
swrc:pages 2267-2280 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/jim/KimJK21/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/jim/KimJK21>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/jim/jim32.html#KimJK21>
rdfs:seeAlso <https://doi.org/10.1007/s10845-020-01639-1>
dc:title A run-to-run controller for a chemical mechanical planarization process using least squares generative adversarial networks. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 32 (xsd:string)