Nonstationary signal analysis and support vector machine based classification for vibration based characterization and monitoring of slit valves in semiconductor manufacturing. | D2R Server publishing the DBLP Bibliography Database, hosted at L3S Research Center

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dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Dragan_Djurdjanovic>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/H._Xie>
dc:creator	<https://dblp.l3s.de/d2r/resource/authors/Marcus_Musselman>
foaf:homepage	<http://dx.doi.org/doi.org%2F10.1007%2Fs10845-017-1308-4>
foaf:homepage	<https://doi.org/10.1007/s10845-017-1308-4>
dc:identifier	DBLP journals/jim/MusselmanXD19 (xsd:string)
dc:identifier	DOI doi.org%2F10.1007%2Fs10845-017-1308-4 (xsd:string)
dcterms:issued	2019 (xsd:gYear)
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rdfs:label	Nonstationary signal analysis and support vector machine based classification for vibration based characterization and monitoring of slit valves in semiconductor manufacturing. (xsd:string)
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Dragan_Djurdjanovic>
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/H._Xie>
foaf:maker	<https://dblp.l3s.de/d2r/resource/authors/Marcus_Musselman>
swrc:number	3 (xsd:string)
swrc:pages	1099-1110 (xsd:string)
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rdfs:seeAlso	<http://dblp.uni-trier.de/db/journals/jim/jim30.html#MusselmanXD19>
rdfs:seeAlso	<https://doi.org/10.1007/s10845-017-1308-4>
dc:title	Nonstationary signal analysis and support vector machine based classification for vibration based characterization and monitoring of slit valves in semiconductor manufacturing. (xsd:string)
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